Micromachined comb drive for quantitative nanoindentation
US8161803B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2009 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Oct 22, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, the indenter tip moveable together with the probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.