Cleaning operations with dwell time
US8163093B1 · kind B1 · utility
73Cited by
22References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2009 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Dec 12, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67057
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods of cleaning one or more workpieces are described. A method includes oscillating workpieces while performing a cleaning operation (e.g., sonication, rinse, etc.) and dwelling the workpieces at one or more oscillation positions (e.g., an upper oscillation position, an lower oscillation position, or an intermediate oscillation position) for corresponding one or more dwell time periods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.