System and method for making Si2H6 and higher silanes
US8163261B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 5, 2005 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Jan 5, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method for making a higher silane from a lower silane comprises heating a lower silane containing stream without exposing it to temperatures more than 20° C. more than the maximum temperature of a first reaction temperature range. The heated lower silane containing stream is introduced into a first reaction zone and allowed to react. The method further comprises mixing a first gaseous mixture from the first reaction zone with a higher silane containing stream and introducing the mixed streams into a second reaction zone operating within a second reaction temperature range. A second gaseous mixture exiting the second reaction zone is separated into various streams. One stream containing unreacted lower silanes is recycled to an earlier heating step and first reaction zone. The higher silane containing stream is mixed with the first gaseous mixture. Average residence time is low to prevent decomposition and formation of undesired silane byproducts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.