Method of making low resisitivity doped zinc oxide coatings and the articles formed thereby
US8163342B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 3, 2007 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | May 30, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2217/24
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A low-resistivity, doped zinc oxide coated glass article is formed by providing a hot glass substrate having a surface on which a coating is to be deposited, the surface being at a temperature of at least 400° C. A zinc containing compound, an oxygen-containing compound and an aluminum- or gallium-containing compound are directed to the surface on which the coating is to be deposited. The zinc containing compound, oxygen-containing compound, and aluminum- or gallium-containing compound are mixed together for a sufficient time that an aluminum or gallium doped zinc oxide coating is formed on the surface at a deposition rate of greater than 5 nm/second.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.