Sputtered piezoelectric material
US8164234B2 · kind B2 · utility
2Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2009 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Jan 28, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Piezoelectric actuators having a composition of Pb1.00+x(Zr0.52Ti0.48)1.00−yO3Nby, where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.