System and method for MEMS array actuation including a charge integration circuit to modulate the charge on a variable gap capacitor during an actuation cycle
US8164588B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2008 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Jun 4, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2300/0809
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An actuator and method for MEMS array actuation is disclosed. In one embodiment, the actuator having a pixel coupled to a charge integration circuit, the pixel comprising a voltage bias, a variable gap capacitor, and a switch, all in series, the charge integration circuit configured to modulate charge on the variable gap capacitor during an actuation cycle. In one embodiment, the MEMS actuator having a unit cell with parasitic capacitance and coupled to a negative feedback sampling circuit, the unit cell comprising a variable gap capacitor, a voltage bias, a modulated current source, and a voltage-to-current converter, the negative feedback sampling circuit configured to receive an output current from the unit cell, convert the output current from the unit cell to a low voltage signal, sample the low voltage signal, and provide a feedback signal to the modulated current source to compensate for the parasitic capacitance in the unit cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.