Patent · US Active

Method for providing a perpendicular magnetic recording (PMR) transducer

US8166632B1 · kind B1 · utility

152Cited by

36References

17Claims

0Family size

Assignee

WESTERN DIGITAL (FREMONT), LLC · US

Inventors

Jinqiu Zhang · Fremont, US
Liubo Hong · San Jose, US
Yong Shen · Saratoga, US
Donghong Li · Milpitas, US

Key dates

Filing date	Mar 28, 2008
Grant date	May 1, 2012
Priority date	—
Expiry date	Nov 25, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49052
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.