Patent · US Active

System and method for improving the precision of nanoscale force and displacement measurements

US8166796B2 · kind B2 · utility

1Cited by
8References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 17, 2010
Grant dateMay 1, 2012
Priority date—
Expiry dateSep 18, 2030

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q40/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A self-calibrating apparatus comprises a primary device and a test structure fabricated on an integrated circuit chip. The primary device and the test structure have at least one unknown property due to a fabrication process of the integrated circuit chip. An electrical measurand sensor is configured to measure an electrical measurand of the test structure. A controller coupled to the primary device and electrical measurand sensor. The controller is configured to calculate the at least one unknown property of the test structure based on the measured electrical measurand and use the calculated at least one unknown property to calibrate the primary device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.