Methods of fabricating electrodes and uses thereof
US8168534B2 · kind B2 · utility
2Cited by
23References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2010 |
| Grant date | May 1, 2012 |
| Priority date | — |
| Expiry date | Nov 12, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49117
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to methods for fabricating nanoscale electrodes separated by a nanogap, wherein the gap size may be controlled with high precision using a self-aligning aluminum oxide mask, such that the gap width depends upon the thickness of the aluminum oxide mask. The invention also provides methods for using the nanoscale electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.