Optical apparatus and method for modifying the imaging behavior of such apparatus

US8169595B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Martin Schriever · Aalen, DE
• Ulrich Wegmann · Oberkochen, DE
• Stefan Hembacher · Bobingen, DE
• Bernhard Geuppert · Lauchheim, DE
• Juergen Huber · Erlangen, DE
• Norbert Kerwien · Mögglingen, DE
• Michael Totzeck · Schwäbisch Gmünd, DE
• Markus Hauf · Ulm, DE

Key dates

• Filing date: Jan 21, 2009
• Grant date: May 1, 2012
• Expiry date: Aug 17, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70266
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure relates to an optical apparatus including a light source that emits light in the form of light pulses having a pulse frequency, and including at least one optical element. The disclosure also relates to a projection exposure machine including a pulsed light source and a projection objective, and to a method for modifying the imaging behavior of such an apparatus, such as in a projection exposure machine.