MEMS anchors
US8169679B2 · kind B2 · utility
23Cited by
63References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2009 |
| Grant date | May 1, 2012 |
| Priority date | — |
| Expiry date | Oct 28, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0307
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.