Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
US8171794B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 14, 2008 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Dec 5, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/131
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.