Micro-thermistor gas pressure sensor
US8171801B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2008 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Dec 1, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method precisely measure gas pressure over a large dynamic range and with good immunity to temperature fluctuations, encompassing applications such as gas sensing, bolometer imaging and industrial process monitoring. The micro-thermistor gas pressure sensor assembly includes a suspended platform micro-thermistor sensor device exposed to the gas pressure of a given atmospheric environment, an electrical readout circuit connected to the suspended platform micro-thermistor sensor device, wherein the suspended platform micro-thermistor sensor device acts as a variable electrical resistance in the readout electrical circuit, a binary-wave voltage source connected to the suspended platform micro-thermistor sensor device, and an ohmmeter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.