Patent · US Active

Driving agent vacuum pump

US8172548B2 · kind B2 · utility

1Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 17, 2009
Grant dateMay 8, 2012
Priority date
Expiry dateMay 23, 2030

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF04F9/00
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

A driving agent vacuum pump configured as a micropump is presented. The vacuum pump includes an evaporation chamber and a pumping chamber, which are separated by a jet arrangement. The jet arrangement includes a planar arrangement of at least one jet running vertically in depth between two plates. The two plates cover the evaporation chamber and the pumping chamber about the jet arrangement. An opening is provided in the pumping chamber above the jet arrangement for taking in an agent to be pumped. A second opening is provided for driving out a compressed gas below the jet arrangement. A connection is provided between the evaporation chamber and the pumping chamber through which a condensed driving agent is returned.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.