Method and system for contacting of a flexible sheet and a substrate
US8172968B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2008 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Jul 9, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/976
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to a method for contacting a flexible sheet to a first element with improved lateral alignment. The method includes a step of measuring a first lateral misalignment after establishing a first contact between the flexible sheet and either of the first element and a sheet parking surface called anchor in the first stage. If the 5 misalignment exceeds a predetermined threshold the flexible sheet is parked at the anchor such that it is not in contact with the first element, and the relative position of the first element and the anchor is altered during the second stage for correcting the mismatch during a contact between the flexible sheet and the first element to be established within the next step of the method. During the steps of shifting the contact point to obtain the second stage 10 the contacting process is more accurate and reproducible than the process for establishing the initial contact. The invention also relates to an apparatus for executing the method, and the use of the method and apparatus for the manufacture of devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.