Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
US8173280B2 · kind B2 · utility
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15References
3Claims
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Key dates
| Filing date | Oct 29, 2009 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Dec 3, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There are provided a nickel oxide film for a bolometer and a manufacturing method thereof, and an infrared detector using the nickel oxide film. The nickel oxide film has properties with a TCR value greater than −3%/° C., a low noise value, and stable and high reproducibility properties. The nickel oxide film is applicable to manufacturing an infrared detector using a nickel oxide film for a bolometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.