Arrangement for producing electromagnetic radiation and method for operating said arrangement
US8173952B2 · kind B2 · utility
1Cited by
3References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 11, 2007 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Oct 22, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for operating an assembly configured to produce electromagnetic radiation, especially X-ray radiation or extreme ultraviolet radiation. Particles, especially electrons, are guided onto a target by way of an adjustable focusing device. The particles produce electromagnetic radiation in the target. At least one object, especially a calibration object, is penetrated by the electromagnetic radiation and a radiogram of the object is recorded. The radiogram or a plurality of radiograms is automatically evaluated and the focusing device is adjusted depending on the evaluation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.