Focal position determining method, focal position determining apparatus, feeble light detecting apparatus and feeble light detecting method
US8174686B2 · kind B2 · utility
12Cited by
20References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2008 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Mar 28, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/245
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A focal position determining method determines a focal position of an objective lens focused on an observed target region in a specimen. The focal position determining method includes measuring any one of the focal position of the objective lens at a near point and the focal position of the objective lens at a far point or both so as to determine the focal position of the objective lens focused on the observed target region based on the measured focal position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.