Method and device for producing an image of a thin layer of an object

US8175353B2 · kind B2 · utility

Assignee

• Carl Zeiss Meditec AG · DE

Inventors

• Peter Westphal · Jena, DE
• Daniel Bublitz · Glinde, DE

Key dates

• Filing date: Jun 27, 2007
• Grant date: May 8, 2012
• Expiry date: Nov 28, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/06
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for producing an image of a layer of an object by a wide field optical element on a resolving detector. The object is illuminated in a focused manner on at least one object plane having at least two binary illuminating patterns. The corresponding images are detected. Light and/or the dark areas of the illuminating patterns completely cover the object when the illuminating pattern is superimposed. A layer image determined from the detected images, includes a partial segment that respectively reproduces a partial area of the object that is arranged inside the light area of one of the used illuminating patterns. Edges are arranged at a distance from the edges of the light area about at least one predefined minimum distance.