Gas sensor and manufacturing method thereof
US8178157B2 · kind B2 · utility
2Cited by
1References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2010 |
| Grant date | May 15, 2012 |
| Priority date | — |
| Expiry date | Jul 29, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensor and manufacturing method thereof. The gas sensor includes a substrate, a pair of electrodes disposed on the substrate, and a gas sensing thin film covering the electrodes, the gas sensing thin film is made up of carbon nanotubes and tin oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.