Effluent gas recovery system in polysilicon and silane plants
US8187361B2 · kind B2 · utility
0Cited by
11References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2009 |
| Grant date | May 29, 2012 |
| Priority date | — |
| Expiry date | Aug 17, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/36
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Purified SiHCl3 and/or SiCl4 are used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.