Patent · US Active

Method for manufacturing liquid discharge head

US8187898B2 · kind B2 · utility

1Cited by
18References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 19, 2008
Grant dateMay 29, 2012
Priority date
Expiry dateOct 21, 2030

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB41J2/1645
  • WIPO fieldTextile and paper machines
  • WIPO sectorMechanical engineering

Abstract

A method for manufacturing a liquid discharge head provided with a substrate which has a layer made of silicon nitride and with a discharge port forming member which is disposed above the layer made of silicon nitride and has a discharge port for discharging liquid. The method includes providing a photosensitive layer that is to be the discharge port forming member above the layer made of silicon nitride, and forming the discharge port by exposing the photosensitive layer to i-line. The layer made of silicon nitride has a refractive index of 2.05 or more to light of a wavelength of 633 nm and irradiation with the i-line is performed in the exposure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.