Surface wave enabled darkfield aperture
US8189204B2 · kind B2 · utility
14Cited by
8References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2010 |
| Grant date | May 29, 2012 |
| Priority date | — |
| Expiry date | Jun 2, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/52
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present invention relate to a surface wave enabled darkfield aperture structure comprising an aperture layer, a aperture in the aperture layer and a plurality of grooves around the aperture. The aperture layer has a first and second surface. The plurality of grooves is in the first surface. A surface wave propagates along at least the first surface. The plurality of grooves is configured to generate a darkfield at the aperture by modifying the surface wave to cancel out direct transmission of a uniform incident light field received by the aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.