Sub-wavelength grating integrated VCSEL

US8189643B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Connie Chang-Hasnain · Palo Alto, US
• Michael Huang · Taipei, TW
• Ye Zhou · London, GB
• Carlos Fernando Rondina Mateus · Berkeley, US

Key dates

• Filing date: Jun 7, 2010
• Grant date: May 29, 2012
• Expiry date: Jun 7, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/187
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A vertical cavity surface emitting laser (VCSEL) is described using a sub-wavelength grating (SWG) structure that has a very broad reflection spectrum and very high reflectivity. The grating comprises segments of high and low refractive index materials with an index differential between the high and low index materials. By way of example, a SWG reflective structure is disposed over a low index cavity region and above another reflective layer (either SWG or DBR). In one embodiment, the SWG structure is movable, such as according to MEMS techniques, in relation to the opposing reflector to provide wavelength selective tuning. The SWG-VCSEL design is scalable to form the optical cavities for a range of SWG-VCSELs at different wavelengths, and wavelength ranges.