LC resonance probe for determining local plasma density
US8190366B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2011 |
| Grant date | May 29, 2012 |
| Priority date | — |
| Expiry date | Sep 30, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for determining plasma parameters such as plasma electron density ne. The probe apparatus includes an LC resonance probe comprising an inductive element and a capacitive element connected in series. The capacitive element of the probe can be in the form of a parallel plate capacitor, a cylindrical capacitor, a spherical capacitor, or any other suitable capacitor. The configuration of the probe apparatus gives it a characteristic resonance frequency ωR0 which can be determined by a circuit analysis device. When the capacitive element of the probe apparatus is placed in a plasma, the probe exhibits a new resonance frequency ωR, which is different from ωR0 because of the dielectric constant ∈ of the plasma. The difference in resonance frequencies can be used to determine plasma density ne, where
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.