Methods of processing a substrate using a flat surface air bearing assembly
US8191227B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2010 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Oct 13, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49998
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A method of processing a substrate, including supporting a substrate using an air bearing produced via an air bearing assembly, the air bearing assembly having: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.