Monitoring device of gas introducing device for analyzer
US8191402B2 · kind B2 · utility
1Cited by
2References
3Claims
0Family size
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Key dates
| Filing date | Jul 11, 2008 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Sep 24, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87619
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Gas is supplied from positive pressure (105 Pa or more) to an analyzer of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and is decompressed by a decompression pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the decompressed gas is introduced to a gas analyzer through a switching operation using a gas switching valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.