Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus

US8192132B2 · kind B2 · utility

Assignee

• VON ARDENNE Anlagentechnik GmbH · DE

Inventors

• Jochen Krause · Frankfurt, DE
• Michael Hofmann · Taufkirchen, DE

Key dates

• Filing date: Nov 26, 2008
• Grant date: Jun 5, 2012
• Expiry date: Mar 19, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a transfer chamber having a housing with a transfer region and a passing band region, a transport device comprising a first arrangement of transport rollers is arranged in the transfer region of the housing, and a passing band comprising a second arrangement of transport rollers is arranged in the passing band region of the housing. The passing band region of the housing is subdivided by a horizontal wall, which is arranged above the passing band, into a transport space, which is located below the horizontal wall, and a pump space, which is located above the horizontal wall. The pump space has a vacuum port or a vacuum pump connected to it.