Scanning probe assisted localized CNT growth
US8192809B2 · kind B2 · utility
4Cited by
0References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 2009 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Apr 27, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q80/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention is a method for localized chemical vapor deposition (CVD) for localized growing for example for carbon nanotubes (CNT), nanowires, and oxidation using a heated tip or an array of heated tips to locally heat the area of interest. As the tips moved, material such as CNTs grows in the direction of movement. The Scanning Probe Growth (SPG) or nanoCVD technique has similarities to the CVD growth; however it allows for controlled synthesis and direction and eliminates the need for masks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.