Glass substrate-holding tool
US8192901B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 21, 2010 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Nov 29, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
To provide a glass substrate-holding tool which is capable of avoiding scratching to the deposition surface of a glass substrate and dusting thereby caused as well as scratching and deposition of foreign substances at a center portion of the rear surface of the substrate and which is capable of suppressing dusting from the holding tool itself at the time of forming a multi-layered reflection film and an absorptive layer. A glass substrate-holding tool having, formed on a surface of a flat base, a catching portion for catching and holding by van der Waals forces, wherein the catching portion is in contact with only the periphery of the glass substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.