Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8193011B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2011 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Oct 19, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.