Patent · US Active

Method for exciting a mobile element of a microstructure

US8193492B2 · kind B2 · utility

0Cited by

9References

17Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

Henri Blanc · Antibes, FR

Key dates

Filing date	Jun 17, 2010
Grant date	Jun 5, 2012
Priority date	—
Expiry date	Jan 6, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C99/004
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The invention pertains to a method for exciting a resonant element of a microstructure, this element being mobile according to one degree of freedom. The method comprises a step for applying a charged particle beam to said microstructure, the beam being configured so as to drive the element in an alternating motion depending on its degree of freedom.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.