Buffered storage and transport device for tool utilization
US8196732B2 · kind B2 · utility
7Cited by
37References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2010 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Feb 5, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.