Patent · US Active

Getter pump and vacuum coating installation comprising a getter pump

US8197222B2 · kind B2 · utility

0Cited by

4References

14Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Falk Milde · Dresden, DE
Hans Hecht · Stuttgart, DE
Joern Brueckner · Rohrbach, DE

Key dates

Filing date	Jul 4, 2007
Grant date	Jun 12, 2012
Priority date	—
Expiry date	Mar 12, 2029

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04B37/02
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.