Sapphire substrates and methods of making same
US8197303B2 · kind B2 · utility
17Cited by
16References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2007 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Feb 25, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B1/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.