Method for depositing electrically insulating layers
US8197648B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2007 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Dec 30, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3467
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for producing a low-conductivity layer on at least one workpiece by vacuum coating is provided. The method includes operating an electrical arc discharge between an anode and a cathode of an arc source in an atmosphere containing a reactive gas. A small external magnetic field is generated to be essentially perpendicular to a target surface of a target, which is electrically connected to the cathode, to assist an evaporation process. A degree of recoating of the target surface by other coating sources in a vacuum coating installation is less than 10%, and the magnetic field is generated by a magnet system with an axially-polarized coil having a geometry similar in size to that of the target.Excitation current for the electrical arc discharge is supplied through the axially-polarized coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.