Diamond film deposition and probes
US8197701B2 · kind B2 · utility
4Cited by
7References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2008 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Sep 15, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Diamond SPM and AFM probes which are durable, particularly for scanning hard surfaces such as diamond surfaces. Interlayers and seeding can be used to improve diamond deposition, and the diamond can be ultrananocrystalline diamond (UNCD). Tip sharpening improves resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.