Method for the production of trichlorosilane

US8197784B2 · kind B2 · utility

Assignee

• Wacker Chemie AG · DE

Inventors

• Bernhard Pfluegler · Burghausen, DE
• Robert Ring · Haiming, DE

Key dates

• Filing date: Oct 12, 2007
• Grant date: Jun 12, 2012
• Expiry date: Feb 10, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P20/54
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

High yields of trichlorosilane are achieved in the reaction of tetrachlorosilane and hydrogen at a temperature in the range of 900° C. to 1300° C. and a pressure above the critical pressure of the reactants.