Flexible electrostatic actuator
US8198974B2 · kind B2 · utility
3Cited by
29References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2005 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | Mar 1, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0081
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.