Laser ablation apparatus and method
US8199321B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 2009 |
| Grant date | Jun 12, 2012 |
| Priority date | — |
| Expiry date | May 13, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/718
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a laser ablation spectroscopy apparatus and method. A pulse laser is focused on the sample site to generate a plasma plume during a laser ablation process. The plasma plume is detected with a spectrometer and an intensified charge coupled device. A sample of material is coupled to a stage movable in the x, y and z directions using an array of x-y-z motors. A change in the height of the sample is detected using a triangulation sensor. The apparatus includes a system computer for synchronizing the movement of the stage in the x, y and z direction during the laser ablation process. The method includes a protocol of generating one or more laser ablations per sample site. The spectral data of the total number of laser ablations for each sample site are averaged together. The protocol includes laser ablating additional sample sites and averaging the spectral data of the total number of sample sites.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.