Patent · US Active

Angular velocity sensor

US8201450B2 · kind B2 · utility

3Cited by
19References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 21, 2008
Grant dateJun 19, 2012
Priority date
Expiry dateAug 15, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N30/302
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An angular velocity sensor comprising a fixed part, a weight coupled with the fixed part via a flexible part having a bending part, a first electrode disposed outside the bending part, and a second electrode disposed inside the bending part, in which the first electrode and the second electrode have an upper electrode and a lower electrode interposed by a piezoelectric layer, respectively, and the width of the first electrode is smaller than the width of the second electrode, and the difference of the amounts of electric charges generated at the first electrode and the second electrode can be suppressed thereby improving the accuracy of detection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.