Apparatus and methods for manufacturing thin-film solar cells
US8202368B2 · kind B2 · utility
10Cited by
28References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2009 |
| Grant date | Jun 19, 2012 |
| Priority date | — |
| Expiry date | Feb 27, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.