MEMS bistable optical switch and methods for use thereof
US8203775B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2011 |
| Grant date | Jun 19, 2012 |
| Priority date | — |
| Expiry date | Aug 16, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical switch including a bistable component, a reflective component, the reflective component being operatively connected to the bistable component, a first electrothermal bent beam actuator, a first contacting component operatively connected to the first electrothermal bent beam actuator component, the first electrothermal bent beam actuator component and the first contacting component disposed such as to enable advancing the bistable component the reflective component from a first stable configuration to a second stable configuration, a second electrothermal bent beam actuator component and a second contacting component operatively connected to the second electrothermal bent beam actuator component, the second electrothermal bent beam actuator component and the second contacting component disposed such as to enable advancing the bistable component and the reflective component from the second stable configuration to the first stable configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.