Imaging interferometric microscopy
US8203782B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2011 |
| Grant date | Jun 19, 2012 |
| Priority date | — |
| Expiry date | Apr 14, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Exemplary embodiments provide an image interferometric microscope (IIM) and methods for image interferometric microscopy. The disclosed IIM can approach the linear systems limits of optical resolution by using a plurality of off-axis illuminations to access high spatial frequencies along with interferometric reintroduction of a zero-order reference beam on the low-NA side of the optical system. In some embodiments, a thin object can be placed normal to the optical axis and the frequency space limit can be extended to about [(1+NA)n/λ], where NA is the numerical-aperture of the objective lens used, n is the refraction index of the transmission medium and λ is an optical wavelength. In other embodiments, tilting the object plane can further allow collection of diffraction information up to the material transmission bandpass limited spatial frequency of about 2n/λ.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.