Apparatus and method for the application of a material layer to display devices
US8206562B2 · kind B2 · utility
3Cited by
9References
46Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 16, 2006 |
| Grant date | Jun 26, 2012 |
| Priority date | — |
| Expiry date | Aug 14, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/103
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention relates to a method and apparatus for the application of material to form a layer of an organic electroluminescent device. The material is sputter deposited typically from at least one target of material held in respect to a magnetron in a coating chamber. The magnetrons used can be unbalanced magnetrons and/or are provided with other magnetrons and/or magnet arrays in a closed field configuration. The material is found to be deposited in a manner which prevents or minimises damage to the device and hence reduces or removes the need for a barrier layer to be applied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.