Device and handling system for measurement of mobility and sheet charge density

US8207748B2 · kind B2 · utility

Assignee

• LEHIGHTON ELECTRONICS, INC. · US

Inventors

• Austin Blew · Lehighton, US
• Michael Bronko · Lehighton, US
• Steven Murphy · Pottsville, US
• Danh Chien Nguyen · Allentown, US
• Nikolai Eberhardt · Bethlehem, US
• Jerome C. Licini · Macungie, US
• William Zuidervliet · Allentown, US

Key dates

• Filing date: Aug 10, 2005
• Grant date: Jun 26, 2012
• Expiry date: Sep 22, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2648
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704). The first end effector (706) can grasp a sheet element (59) and move it to a desired position within the test apparatus (10), while the rotator lifter (704) provides incremental adjustment of a theta angle of the sheet element (59) to allow automated mapping of an entire sheet element without the need for manual adjustment of the position of the sheet element. A second end effector (716) can be mounted opposite the first end effector (706) and can be used to automa…