Patent · US Active

Method for releasing the suspended structure of a NEMS and/or NEMS component

US8211729B2 · kind B2 · utility

3Cited by
2References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 3, 2010
Grant dateJul 3, 2012
Priority date—
Expiry dateAug 11, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/01
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A method for making a microelectronic device comprising at least one electromechanical component provided with a mobile structure,

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.