Probes for enhanced magnetic force microscopy resolution
US8214918B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2009 |
| Grant date | Jul 3, 2012 |
| Priority date | — |
| Expiry date | Jun 7, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y25/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Magnetic Force Microscopy (MFM) probe tips that provide enhanced spatial resolution and methods of manufacture are provided. In one aspect, two or more magnetically-decoupled layers may be deposited on an AFM probe in order to create an active magnetic region at about the apex of the probe tip with dimensions less than about 10 nanometers. In another aspect, nanoscale patterning techniques may be employed to fabricate probe tips that possess plateau features. These plateau features may serve as substrates for the deposition of magnetic films having properties similar to magnetic recording media. Machining techniques, such as Focused Ion Beam (FIB) may be further employed to reduce the size of the magnetic materials deposited upon the substrate. Beneficially, because the plateaus of the substrate are substantially flat and of known geometry, and the magnetic properties of magnetic films deposited on flat surfaces are similar to those deposited upon the plateau, the magnetization of the MFM probe tips may be determined to high accuracy. In this manner, fine control over the magnetic properties of MFM probe tips may be achieved, providing enhanced MFM resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.