Fatigue resistant MEMS apparatus and system
US8218218B2 · kind B2 · utility
11Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2009 |
| Grant date | Jul 10, 2012 |
| Priority date | — |
| Expiry date | Nov 21, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04M1/72412
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.