Optical waveguide substrate with optical fiber fixation groove, process for its production, stamps for use in this production process, and opto-electronic hybrid integrated module including said optical waveguide substrate
US8218923B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Jun 2, 2009 |
| Grant date | Jul 10, 2012 |
| Priority date | — |
| Expiry date | Jul 8, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/423
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide substrate with an optical fiber fixation groove, including an optical waveguide which contains a lower cladding layer on a base substrate, wherein the lower cladding layer has an optical fiber fixation groove and a core groove, and a weir is provided between the optical fiber fixation groove and the core groove. The optical waveguide substrate with an optical fiber fixation groove is produced by forming a lower cladding layer on a base substrate using a male stamp produced from a female stamp and then successively forming a core layer and an upper cladding layer thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.